Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510567 | Integrated substrate temperature measurement on high temperature ceramic heater | Yizhen Zhang, Rupankar Choudhury, Jason M. Schaller, Hanish Kumar Panavalappil Kumarankutty | 2019-12-17 |
| 10428426 | Method and apparatus to prevent deposition rate/thickness drift, reduce particle defects and increase remote plasma system lifetime | Daemian Raj, Ying Ma, Dongqing Li | 2019-10-01 |
| 10403535 | Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system | Zheng John Ye, Hiroji Hanawa, Jianhua Zhou, Xing Lin, Ren-Guan Duan +11 more | 2019-09-03 |
| 10388549 | On-board metrology (OBM) design and implication in process tool | Khokan Chandra Paul, Juan Carlos Rocha-Alvarez, Hari Ponnekanti, Rupankar Choudhury, Shekhar ATHANI +2 more | 2019-08-20 |
| 10192717 | Conditioning remote plasma source for enhanced performance having repeatable etch and deposition rates | Abdul Aziz Khaja, Mohamad A. Ayoub, Juan Carlos Rocha-Alvarez | 2019-01-29 |