Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510567 | Integrated substrate temperature measurement on high temperature ceramic heater | Yizhen Zhang, Rupankar Choudhury, Jay D. Pinson, II, Hanish Kumar Panavalappil Kumarankutty | 2019-12-17 |
| 10468292 | Shutter disk for physical vapor deposition chamber | Karl M. Brown | 2019-11-05 |
| 10443934 | Substrate handling and heating system | Morgan Evans, D. Jeffrey Lischer, Ala Moradian, William T. Weaver, Robert Brent Vopat | 2019-10-15 |
| 10427303 | Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing | William T. Weaver, Malcolm N. Daniel, JR., Robert Brent Vopat, Jacob Newman, Dinesh Kanawade +4 more | 2019-10-01 |
| 10283379 | Batch LED heating and cooling chamber or loadlock | Robert Brent Vopat, Paul E. Pergande, Benjamin B. Riordon, David Blahnik, William T. Weaver | 2019-05-07 |
| 10256125 | Wafer processing systems including multi-position batch load lock apparatus with temperature control capability | William T. Weaver, Joseph Yudovsky, Jeffrey Blahnik, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more | 2019-04-09 |
| 10249525 | Dynamic leveling process heater lift | Michael Paul Rohrer, Tuan Nguyen, William T. Weaver, Gregory John Freeman, Robert Brent Vopat | 2019-04-02 |