Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10443934 | Substrate handling and heating system | Jason M. Schaller, D. Jeffrey Lischer, Ala Moradian, William T. Weaver, Robert Brent Vopat | 2019-10-15 |
| 10302826 | Controlling etch angles by substrate rotation in angled etch tools | Rutger Meyer Timmerman Thijssen, Joseph C. Olson | 2019-05-28 |
| 10276340 | Low particle capacitively coupled components for workpiece processing | Ernest E. Allen, Tyler Rockwell, Richard J. Hertel, Joseph F. Sommers, Christopher Campbell | 2019-04-30 |
| 10269663 | Critical dimensions variance compensation | Tristan Y. Ma, Kevin Anglin, Motoya Okazaki, Johannes M. van Meer | 2019-04-23 |
| 10222202 | Three dimensional structure fabrication control using novel processing system | Simon Ruffell, Tristan Y. Ma, Kevin Anglin | 2019-03-05 |