Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395969 | Transparent halo for reduced particle generation | Costel Biloiu, Frank Sinclair | 2019-08-27 |
| 10325752 | Performance extraction set | Adam Calkins | 2019-06-18 |
| 10276340 | Low particle capacitively coupled components for workpiece processing | Morgan Evans, Tyler Rockwell, Richard J. Hertel, Joseph F. Sommers, Christopher Campbell | 2019-04-30 |