Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10276340 | Low particle capacitively coupled components for workpiece processing | Morgan Evans, Ernest E. Allen, Richard J. Hertel, Joseph F. Sommers, Christopher Campbell | 2019-04-30 |
| 10224181 | Radio frequency extraction system for charge neutralized ion beam | Costel Biloiu, Piotr Lubicki, Christopher Campbell, Vikram Singh, Kevin M. Daniels +3 more | 2019-03-05 |
| 10193066 | Apparatus and techniques for anisotropic substrate etching | Glen Gilchrist, Raees Pervaiz, Kenneth L. Starks, Shurong Liang | 2019-01-29 |