Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10262833 | Temperature controlled ion source | Scott C. Holden, Bon-Woong Koo, Brant S. Binns, Richard M. White, Eric R. Cobb | 2019-04-16 |
| 10193066 | Apparatus and techniques for anisotropic substrate etching | Glen Gilchrist, Raees Pervaiz, Shurong Liang, Tyler Rockwell | 2019-01-29 |