Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10290475 | Biasing system for a plasma processing apparatus | Bon-Woong Koo | 2019-05-14 |
| 10262833 | Temperature controlled ion source | Scott C. Holden, Bon-Woong Koo, Brant S. Binns, Kenneth L. Starks, Eric R. Cobb | 2019-04-16 |