Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10410844 | RF clean system for electrostatic elements | Kevin Anglin, Peter F. Kurunczi, Jay T. Scheuer, Eric D. Hermanson, Alexandre Likhanskii | 2019-09-10 |
| 10262833 | Temperature controlled ion source | Scott C. Holden, Bon-Woong Koo, Richard M. White, Kenneth L. Starks, Eric R. Cobb | 2019-04-16 |