EH

Eric D. Hermanson

VA Varian Semiconductor Equipment Associates: 3 patents #19 of 161Top 15%
🗺 Massachusetts: #1,612 of 14,267 inventorsTop 15%
Overall (2019): #91,442 of 560,194Top 20%
3
Patents 2019

Issued Patents 2019

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
10504682 Conductive beam optic containing internal heating element Shengwu Chang, Frank Sinclair, Alexandre Likhanskii, Christopher Campbell, Robert C. Lindberg 2019-12-10
10446372 Dual cathode ion source Bon-Woong Koo, Jun Lu, Frank Sinclair, Joseph E. Pierro, Michael D. Johnson +2 more 2019-10-15
10410844 RF clean system for electrostatic elements Kevin Anglin, Brant S. Binns, Peter F. Kurunczi, Jay T. Scheuer, Alexandre Likhanskii 2019-09-10