Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522330 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Peter F. Kurunczi, Ryan Downey, Alexandre Likhanskii +1 more | 2019-12-31 |
| 10410844 | RF clean system for electrostatic elements | Kevin Anglin, Brant S. Binns, Peter F. Kurunczi, Eric D. Hermanson, Alexandre Likhanskii | 2019-09-10 |