Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522330 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Peter F. Kurunczi, Ryan Downey, Jay T. Scheuer +1 more | 2019-12-31 |
| 10504682 | Conductive beam optic containing internal heating element | Shengwu Chang, Frank Sinclair, Christopher Campbell, Robert C. Lindberg, Eric D. Hermanson | 2019-12-10 |
| 10410844 | RF clean system for electrostatic elements | Kevin Anglin, Brant S. Binns, Peter F. Kurunczi, Jay T. Scheuer, Eric D. Hermanson | 2019-09-10 |
| 10290462 | High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture | Bon-Woong Koo, Svetlana B. Radovanov, Anthony Renau | 2019-05-14 |
| 10224181 | Radio frequency extraction system for charge neutralized ion beam | Costel Biloiu, Piotr Lubicki, Tyler Rockwell, Christopher Campbell, Vikram Singh +3 more | 2019-03-05 |
| 10192727 | Electrodynamic mass analysis | Frank Sinclair, Joseph C. Olson, Costel Biloiu, Peter F. Kurunczi | 2019-01-29 |