Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522330 | In-situ plasma cleaning of process chamber components | Kevin Anglin, Peter F. Kurunczi, Ryan Downey, Jay T. Scheuer, Alexandre Likhanskii +1 more | 2019-12-31 |
| 10324121 | Charge integration based electrostatic clamp health monitor | Edward K. McIntyre, Edward J. Ladny, Nathaniel Robinson | 2019-06-18 |