Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522330 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Ryan Downey, Jay T. Scheuer, Alexandre Likhanskii +1 more | 2019-12-31 |
| 10410844 | RF clean system for electrostatic elements | Kevin Anglin, Brant S. Binns, Jay T. Scheuer, Eric D. Hermanson, Alexandre Likhanskii | 2019-09-10 |
| 10290466 | Boron implanting using a co-gas | Bon-Woong Koo, Vikram M. Bhosle, John A. Frontiero, Nicholas P. T. Bateman, Timothy J. Miller +3 more | 2019-05-14 |
| 10224181 | Radio frequency extraction system for charge neutralized ion beam | Costel Biloiu, Piotr Lubicki, Tyler Rockwell, Christopher Campbell, Vikram Singh +3 more | 2019-03-05 |
| 10192727 | Electrodynamic mass analysis | Frank Sinclair, Joseph C. Olson, Costel Biloiu, Alexandre Likhanskii | 2019-01-29 |