Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10446371 | Boron implanting using a co-gas | Vikram M. Bhosle, John A. Frontiero | 2019-10-15 |
| 10446372 | Dual cathode ion source | Jun Lu, Frank Sinclair, Eric D. Hermanson, Joseph E. Pierro, Michael D. Johnson +2 more | 2019-10-15 |
| 10290462 | High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture | Alexandre Likhanskii, Svetlana B. Radovanov, Anthony Renau | 2019-05-14 |
| 10290466 | Boron implanting using a co-gas | Vikram M. Bhosle, John A. Frontiero, Nicholas P. T. Bateman, Timothy J. Miller, Svetlana B. Radovanov +3 more | 2019-05-14 |
| 10290475 | Biasing system for a plasma processing apparatus | Richard M. White | 2019-05-14 |
| 10262833 | Temperature controlled ion source | Scott C. Holden, Brant S. Binns, Richard M. White, Kenneth L. Starks, Eric R. Cobb | 2019-04-16 |