Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522330 | In-situ plasma cleaning of process chamber components | William Davis Lee, Peter F. Kurunczi, Ryan Downey, Jay T. Scheuer, Alexandre Likhanskii +1 more | 2019-12-31 |
| 10410844 | RF clean system for electrostatic elements | Brant S. Binns, Peter F. Kurunczi, Jay T. Scheuer, Eric D. Hermanson, Alexandre Likhanskii | 2019-09-10 |
| 10269663 | Critical dimensions variance compensation | Morgan Evans, Tristan Y. Ma, Motoya Okazaki, Johannes M. van Meer | 2019-04-23 |
| 10222202 | Three dimensional structure fabrication control using novel processing system | Morgan Evans, Simon Ruffell, Tristan Y. Ma | 2019-03-05 |