Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10381232 | Techniques for manipulating patterned features using ions | Huixiong Dai, Jun Lang, John Hautala | 2019-08-13 |
| 10280512 | Apparatus and method for carbon film deposition profile control | Alex Tsung-Liang Chen | 2019-05-07 |
| 10229832 | Techniques for forming patterned features using directional ions | Steven R. Sherman, John Hautala | 2019-03-12 |
| 10222202 | Three dimensional structure fabrication control using novel processing system | Morgan Evans, Tristan Y. Ma, Kevin Anglin | 2019-03-05 |
| 10204909 | Non-uniform gate oxide thickness for DRAM device | Arvind Kumar, Tristan Y. Ma, Kyu-Ha Shim, John Hautala, Steven R. Sherman | 2019-02-12 |