Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10332748 | Etch rate modulation through ion implantation | Rajesh Prasad, Andrew Waite, Sungho Jo, Kyu-Ha Shim, Guy Oteri +1 more | 2019-06-25 |
| 10310379 | Multiple patterning approach using ion implantation | Tristan Y. Ma, Maureen Petterson, John Hautala | 2019-06-04 |
| 10229832 | Techniques for forming patterned features using directional ions | John Hautala, Simon Ruffell | 2019-03-12 |
| 10204909 | Non-uniform gate oxide thickness for DRAM device | Simon Ruffell, Arvind Kumar, Tristan Y. Ma, Kyu-Ha Shim, John Hautala | 2019-02-12 |