Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515802 | Techniques for forming low stress mask using implantation | Tzu-Yu Liu, Edwin Arevalo, Deven Raj Mittal, Somchintana Norasetthekul, Kyuha Shim +5 more | 2019-12-24 |
| 10403738 | Techniques for improved spacer in nanosheet device | Min Gyu Sung, John Hautala, Sony Varghese | 2019-09-03 |
| 10354875 | Techniques for improved removal of sacrificial mask | Ning Zhan, Tzu-Yu Liu, James Cournoyer, Kyu-Ha Shim, Kwangduk Douglas Lee +4 more | 2019-07-16 |
| 10332748 | Etch rate modulation through ion implantation | Steven R. Sherman, Andrew Waite, Sungho Jo, Kyu-Ha Shim, Guy Oteri +1 more | 2019-06-25 |