Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515802 | Techniques for forming low stress mask using implantation | Rajesh Prasad, Tzu-Yu Liu, Edwin Arevalo, Deven Raj Mittal, Kyuha Shim +5 more | 2019-12-24 |
| 10332748 | Etch rate modulation through ion implantation | Rajesh Prasad, Steven R. Sherman, Andrew Waite, Sungho Jo, Kyu-Ha Shim +1 more | 2019-06-25 |