Issued Patents 2019
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510518 | Methods of dry stripping boron-carbon films | Sudha Rathi, Ramprakash Sankarakrishnan, Martin Jay Seamons, Irfan Jamil, Bok Hoen Kim | 2019-12-17 |
| 10504727 | Thick tungsten hardmask films deposition on high compressive/tensile bow wafers | Jiarui Wang, Prashant Kumar Kulshreshtha, Eswaranand Venkatasubramanian, Susmit Singha Roy | 2019-12-10 |
| 10418243 | Ultra-high modulus and etch selectivity boron-carbon hardmask films | Prashant Kumar Kulshreshtha, Ziqing Duan, Karthik Thimmavajjula Narasimha, Bok Hoen Kim | 2019-09-17 |
| 10403515 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2019-09-03 |
| 10403535 | Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system | Zheng John Ye, Jay D. Pinson, II, Hiroji Hanawa, Jianhua Zhou, Xing Lin +11 more | 2019-09-03 |
| 10373822 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Martin Jay Seamons +5 more | 2019-08-06 |
| 10354875 | Techniques for improved removal of sacrificial mask | Rajesh Prasad, Ning Zhan, Tzu-Yu Liu, James Cournoyer, Kyu-Ha Shim +4 more | 2019-07-16 |
| 10325800 | High temperature electrostatic chucking with dielectric constant engineered in-situ charge trap materials | Prashant Kumar Kulshreshtha, Bok Hoen Kim, Zheng John Ye, Swayambhu Prasad Behera, Ganesh Balasubramanian +2 more | 2019-06-18 |
| 10236225 | Method for PECVD overlay improvement | Yoichi Suzuki, Michael Wenyoung Tsiang, Takashi Morii, Yuta GOTO | 2019-03-19 |