Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418243 | Ultra-high modulus and etch selectivity boron-carbon hardmask films | Prashant Kumar Kulshreshtha, Ziqing Duan, Kwangduk Douglas Lee, Bok Hoen Kim | 2019-09-17 |
| 10403515 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2019-09-03 |