Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504727 | Thick tungsten hardmask films deposition on high compressive/tensile bow wafers | Jiarui Wang, Eswaranand Venkatasubramanian, Susmit Singha Roy, Kwangduk Douglas Lee | 2019-12-10 |
| 10418243 | Ultra-high modulus and etch selectivity boron-carbon hardmask films | Ziqing Duan, Karthik Thimmavajjula Narasimha, Kwangduk Douglas Lee, Bok Hoen Kim | 2019-09-17 |
| 10403515 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Karthik Thimmavajjula Narasimha +12 more | 2019-09-03 |
| 10403535 | Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system | Zheng John Ye, Jay D. Pinson, II, Hiroji Hanawa, Jianhua Zhou, Xing Lin +11 more | 2019-09-03 |
| 10373822 | Gas flow profile modulated control of overlay in plasma CVD films | Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee, Martin Jay Seamons +5 more | 2019-08-06 |
| 10325800 | High temperature electrostatic chucking with dielectric constant engineered in-situ charge trap materials | Kwangduk Douglas Lee, Bok Hoen Kim, Zheng John Ye, Swayambhu Prasad Behera, Ganesh Balasubramanian +2 more | 2019-06-18 |