Prashant Kumar Kulshreshtha — 6 Patents at Applied Materials

Issued Patents 2019

Showing 1–6 of 6 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
10504727	Thick tungsten hardmask films deposition on high compressive/tensile bow wafers	Jiarui Wang, Eswaranand Venkatasubramanian, Susmit Singha Roy, Kwangduk Douglas Lee	2019-12-10	$14,920,000
10418243	Ultra-high modulus and etch selectivity boron-carbon hardmask films	Ziqing Duan, Karthik Thimmavajjula Narasimha, Kwangduk Douglas Lee, Bok Hoen Kim	2019-09-17	$56,752,000
10403515	Loadlock integrated bevel etcher system	Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Karthik Thimmavajjula Narasimha +12 more	2019-09-03	$20,988,000
10403535	Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system	Zheng John Ye, Jay D. Pinson, II, Hiroji Hanawa, Jianhua Zhou, Xing Lin +11 more	2019-09-03	$20,988,000
10373822	Gas flow profile modulated control of overlay in plasma CVD films	Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee, Martin Jay Seamons +5 more	2019-08-06	$24,698,000
10325800	High temperature electrostatic chucking with dielectric constant engineered in-situ charge trap materials	Kwangduk Douglas Lee, Bok Hoen Kim, Zheng John Ye, Swayambhu Prasad Behera, Ganesh Balasubramanian +2 more	2019-06-18	$21,126,000