Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510547 | Metal and metal-derived films | Yingli Rao, Srinivas Gandikota | 2019-12-17 |
| 10504727 | Thick tungsten hardmask films deposition on high compressive/tensile bow wafers | Jiarui Wang, Prashant Kumar Kulshreshtha, Eswaranand Venkatasubramanian, Kwangduk Douglas Lee | 2019-12-10 |
| 10410865 | Methods of forming self-aligned vias | David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Abhijit Basu Mallick, Ziqing Duan +3 more | 2019-09-10 |
| 10403542 | Methods of forming self-aligned vias and air gaps | Ziqing Duan, Abhijit Basu Mallick, Praburam Gopalraja | 2019-09-03 |
| 10403502 | Boron doped tungsten carbide for hardmask applications | Eswaranand Venkatasubramanian, Abhijit Basu Mallick, Takehito Koshizawa | 2019-09-03 |
| 10319624 | Oxidative volumetric expansion of metals and metal containing compounds | Yihong Chen, Kelvin Chan, Abhijit Basu Mallick, Srinivas Gandikota, Pramit Manna | 2019-06-11 |
| 10312137 | Hardmask layer for 3D NAND staircase structure in semiconductor applications | Eswaranand Venkatasubramanian, Pramit Manna, Abhijit Basu Mallick | 2019-06-04 |