Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504727 | Thick tungsten hardmask films deposition on high compressive/tensile bow wafers | Prashant Kumar Kulshreshtha, Eswaranand Venkatasubramanian, Susmit Singha Roy, Kwangduk Douglas Lee | 2019-12-10 |
| 10468221 | Shadow frame with sides having a varied profile for improved deposition uniformity | Gaku Furuta, Soo Young Choi, Yi Cui, Robin L. Tiner, Jinhyun CHO +1 more | 2019-11-05 |