Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504727 | Thick tungsten hardmask films deposition on high compressive/tensile bow wafers | Jiarui Wang, Prashant Kumar Kulshreshtha, Susmit Singha Roy, Kwangduk Douglas Lee | 2019-12-10 |
| 10475642 | Doped and undoped vanadium oxides for low-k spacer applications | Srinivas Gandikota, Kelvin Chan, Atashi Basu, Abhijit Basu Mallick | 2019-11-12 |
| 10403502 | Boron doped tungsten carbide for hardmask applications | Abhijit Basu Mallick, Susmit Singha Roy, Takehito Koshizawa | 2019-09-03 |
| 10312137 | Hardmask layer for 3D NAND staircase structure in semiconductor applications | Susmit Singha Roy, Pramit Manna, Abhijit Basu Mallick | 2019-06-04 |