Issued Patents 2019
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510547 | Metal and metal-derived films | Susmit Singha Roy, Yingli Rao | 2019-12-17 |
| 10480066 | Metal deposition methods | Yong Wu, Abhijit Basu Mallick | 2019-11-19 |
| 10475642 | Doped and undoped vanadium oxides for low-k spacer applications | Eswaranand Venkatasubramanian, Kelvin Chan, Atashi Basu, Abhijit Basu Mallick | 2019-11-12 |
| 10468263 | Tungsten deposition without barrier layer | Yihong Chen, Yong Wu, Chia Cheng Chin | 2019-11-05 |
| 10407771 | Atomic layer deposition chamber with thermal lid | Anqing Cui, Faruk Gungor, Dien-Yeh Wu, Vikas Jangra, Muhammad M. Rasheed +6 more | 2019-09-10 |
| 10410865 | Methods of forming self-aligned vias | David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy +3 more | 2019-09-10 |
| 10410869 | CVD based oxide-metal multi structure for 3D NAND memory devices | Susmit Singha Roy, Kelvin Chan, Hien Minh Le, Sanjay Kamath, Abhijit Basu Mallick +1 more | 2019-09-10 |
| 10347488 | Titanium compound based hard mask films | Rui Cheng, Wei V. Tang, Pramit Manna, Abhijit Basu Mallick | 2019-07-09 |
| 10319604 | Methods for self-aligned patterning | Ziqing Duan, Yihong Chen, Abhijit Basu Mallick | 2019-06-11 |
| 10319636 | Deposition and treatment of films for patterning | Atashi Basu, Abhijit Basu Mallick, Ziqing Duan | 2019-06-11 |
| 10319624 | Oxidative volumetric expansion of metals and metal containing compounds | Susmit Singha Roy, Yihong Chen, Kelvin Chan, Abhijit Basu Mallick, Pramit Manna | 2019-06-11 |
| 10269633 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu +2 more | 2019-04-23 |
| 10192775 | Methods for gapfill in high aspect ratio structures | Pramit Manna, Ludovic Godet, Rui Cheng, Erica Chen, Ziqing Duan +1 more | 2019-01-29 |