Issued Patents 2019
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510589 | Cyclic conformal deposition/anneal/etch for Si gapfill | Yi Yang, Abhijit Basu Mallick | 2019-12-17 |
| 10460933 | Two-step process for gapfilling high aspect ratio trenches with amorphous silicon film | Pramit Manna, Shishi Jiang, Abhijit Basu Mallick | 2019-10-29 |
| 10410864 | Hybrid carbon hardmask for lateral hardmask recess reduction | Thomas Jongwan Kwon, Abhijit Basu Mallick, Er-Xuan Ping, Jaesoo Ahn | 2019-09-10 |
| 10410872 | Borane mediated dehydrogenation process from silane and alkylsilane species for spacer and hardmask application | Ziqing Duan, Milind Gadre, Praket P. Jha, Abhijit Basu Mallick, Deenesh Padhi | 2019-09-10 |
| 10347488 | Titanium compound based hard mask films | Wei V. Tang, Pramit Manna, Abhijit Basu Mallick, Srinivas Gandikota | 2019-07-09 |
| 10319600 | Thermal silicon etch | Zihui Li, Anchuan Wang, Nitin K. Ingle, Abhijit Basu Mallick | 2019-06-11 |
| 10276379 | Treatment approach to improve film roughness by improving nucleation/adhesion of silicon oxide | Abhijit Basu Mallick, Yihong Chen | 2019-04-30 |
| 10192775 | Methods for gapfill in high aspect ratio structures | Pramit Manna, Ludovic Godet, Erica Chen, Ziqing Duan, Abhijit Basu Mallick +1 more | 2019-01-29 |