| 10510589 |
Cyclic conformal deposition/anneal/etch for Si gapfill |
Yi Yang, Abhijit Basu Mallick |
2019-12-17 |
| 10460933 |
Two-step process for gapfilling high aspect ratio trenches with amorphous silicon film |
Pramit Manna, Shishi Jiang, Abhijit Basu Mallick |
2019-10-29 |
| 10410864 |
Hybrid carbon hardmask for lateral hardmask recess reduction |
Thomas Jongwan Kwon, Abhijit Basu Mallick, Er-Xuan Ping, Jaesoo Ahn |
2019-09-10 |
| 10410872 |
Borane mediated dehydrogenation process from silane and alkylsilane species for spacer and hardmask application |
Ziqing Duan, Milind Gadre, Praket P. Jha, Abhijit Basu Mallick, Deenesh Padhi |
2019-09-10 |
| 10347488 |
Titanium compound based hard mask films |
Wei V. Tang, Pramit Manna, Abhijit Basu Mallick, Srinivas Gandikota |
2019-07-09 |
| 10319600 |
Thermal silicon etch |
Zihui Li, Anchuan Wang, Nitin K. Ingle, Abhijit Basu Mallick |
2019-06-11 |
| 10276379 |
Treatment approach to improve film roughness by improving nucleation/adhesion of silicon oxide |
Abhijit Basu Mallick, Yihong Chen |
2019-04-30 |
| 10192775 |
Methods for gapfill in high aspect ratio structures |
Pramit Manna, Ludovic Godet, Erica Chen, Ziqing Duan, Abhijit Basu Mallick +1 more |
2019-01-29 |
