Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490436 | Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide films | Kalyanjit Ghosh, Mayur Govind Kulkarni, Sanjeev Baluja, Krishna Nittala | 2019-11-26 |
| 10483282 | VNAND tensile thick TEOS oxide | Michael Wenyoung Tsiang, Xinhai Han, Bok Hoen Kim, Sang Hyuk Kim, Myung Hun Ju +8 more | 2019-11-19 |
| 10410872 | Borane mediated dehydrogenation process from silane and alkylsilane species for spacer and hardmask application | Rui Cheng, Ziqing Duan, Milind Gadre, Abhijit Basu Mallick, Deenesh Padhi | 2019-09-10 |
| 10373822 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Sudha Rathi, Saptarshi Basu, Kwangduk Douglas Lee, Martin Jay Seamons +5 more | 2019-08-06 |
| 10276353 | Dual-channel showerhead for formation of film stacks | Kaushik Alayavalli, Xinhai Han, Masaki Ogata, Zhijun Jiang, Allen Ko +6 more | 2019-04-30 |
| 10246772 | Plasma enhanced chemical vapor deposition of films for improved vertical etch performance in 3D NAND memory devices | Allen Ko, Xinhai Han, Thomas Jongwan Kwon, Bok Hoen Kim, Byung Ho Kil +2 more | 2019-04-02 |
| 10199388 | VNAND tensile thick TEOS oxide | Michael Wenyoung Tsiang, Xinhai Han, Bok Hoen Kim, Sang Hyuk Kim, Myung Hun Ju +8 more | 2019-02-05 |