Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515796 | Dry etch rate reduction of silicon nitride films | Michael Wenyoung Tsiang, Hang Yu, Tza-Jing Gung | 2019-12-24 |
| 10410872 | Borane mediated dehydrogenation process from silane and alkylsilane species for spacer and hardmask application | Rui Cheng, Ziqing Duan, Milind Gadre, Praket P. Jha, Abhijit Basu Mallick | 2019-09-10 |
| 10236182 | Conformal amorphous carbon for spacer and spacer protection applications | Sungjin Kim, Sung Hyun Hong, Bok Hoen Kim, Derek R. Witty | 2019-03-19 |
| 10227695 | Shadow ring for modifying wafer edge and bevel deposition | Dale R. Du Bois, Mohamad A. Ayoub, Robert W. Kim, Amit Kumar BANSAL, Mark Fodor +6 more | 2019-03-12 |