Issued Patents 2019
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438860 | Dynamic wafer leveling/tilting/swiveling steps for use during a chemical vapor deposition process | Juan Carlos Rocha, Karthik Janakiraman, Tuan Nguyen | 2019-10-08 |
| 10431480 | External substrate rotation in a semiconductor processing system | Tuan Nguyen, Juan Carlos Rocha-Alvarez | 2019-10-01 |
| 10385448 | Apparatus and method for purging gaseous compounds | Juan Carlos Rocha-Alvarez, Ganesh Balasubramanian, Jianhua Zhou, Ramprakash Sankarakrishnan | 2019-08-20 |
| 10388121 | Method for providing notifications | Ayushi GUPTA, Prantik Banerjee, Theophilus Thomas, Kyoungwoon Hahm, Arun Prabhakar +18 more | 2019-08-20 |
| 10347465 | Apparatus and method for tuning a plasma profile using a tuning electrode in a processing chamber | Mohamad A. Ayoub, Jian J. Chen | 2019-07-09 |
| 10276353 | Dual-channel showerhead for formation of film stacks | Kaushik Alayavalli, Xinhai Han, Praket P. Jha, Masaki Ogata, Zhijun Jiang +6 more | 2019-04-30 |
| 10266943 | Plasma corrosion resistive heater for high temperature processing | Abdul Aziz Khaja, Ren-Guan Duan, Jianhua Zhou, Juan Carlos Rocha-Alvarez | 2019-04-23 |
| 10233543 | Showerhead assembly with multiple fluid delivery zones | Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Sam Kim, Tuan Nguyen | 2019-03-19 |
| 10227695 | Shadow ring for modifying wafer edge and bevel deposition | Dale R. Du Bois, Mohamad A. Ayoub, Robert W. Kim, Mark Fodor, Binh Nguyen +6 more | 2019-03-12 |