Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438860 | Dynamic wafer leveling/tilting/swiveling steps for use during a chemical vapor deposition process | Amit Kumar BANSAL, Karthik Janakiraman, Tuan Nguyen | 2019-10-08 |
| 10227695 | Shadow ring for modifying wafer edge and bevel deposition | Dale R. Du Bois, Mohamad A. Ayoub, Robert W. Kim, Amit Kumar BANSAL, Mark Fodor +6 more | 2019-03-12 |