| 10518418 |
Wafer swapper |
Juan Carlos Rocha-Alvarez, Karthik Janakiraman, Hari Ponnekanti, Sanjeev Baluja, Prajeeth Wilton |
2019-12-31 |
| 10480077 |
PEALD apparatus to enable rapid cycling |
Jianhua Zhou, Juan Carlos Rocha-Alvarez |
2019-11-19 |
| 10403515 |
Loadlock integrated bevel etcher system |
Saptarshi Basu, Jeongmin Lee, Paul Connors, Prashant Kumar Kulshreshtha, Karthik Thimmavajjula Narasimha +12 more |
2019-09-03 |
| 10325799 |
Dual temperature heater |
Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Ganesh Balasubramanian, Lipyeow Yap, Jianhua Zhou +1 more |
2019-06-18 |
| 10281261 |
In-situ metrology method for thickness measurement during PECVD processes |
Khokan Chandra Paul, Edward W. Budiarto, Todd Egan, Mehdi Vaez-Iravani, Jeongmin Lee +1 more |
2019-05-07 |
| 10240234 |
Gas distribution apparatus for processing chambers |
Kien N. Chuc, Karthik Janakiraman |
2019-03-26 |
| 10227695 |
Shadow ring for modifying wafer edge and bevel deposition |
Mohamad A. Ayoub, Robert W. Kim, Amit Kumar BANSAL, Mark Fodor, Binh Nguyen +6 more |
2019-03-12 |
