Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10354843 | Chemical control features in wafer process equipment | Qiwei Liang, Xinglong Chen, Dmitry Lubomirsky, Soonam Park, Jang-Gyoo Yang +4 more | 2019-07-16 |
| 10283321 | Semiconductor processing system and methods using capacitively coupled plasma | Jang-Gyoo Yang, Matthew L. Miller, Xinglong Chen, Qiwei Liang, Shankar Venkataraman +1 more | 2019-05-07 |
| 10240234 | Gas distribution apparatus for processing chambers | Dale R. Du Bois, Karthik Janakiraman | 2019-03-26 |