Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504697 | Particle generation suppresor by DC bias modulation | Jonghoon Baek, Soonam Park, Dmitry Lubomirsky | 2019-12-10 |
| 10424485 | Enhanced etching processes using remote plasma sources | Nitin K. Ingle, Dmitry Lubomirsky, Shankar Venkataraman | 2019-09-24 |
| 10354843 | Chemical control features in wafer process equipment | Qiwei Liang, Kien N. Chuc, Dmitry Lubomirsky, Soonam Park, Jang-Gyoo Yang +4 more | 2019-07-16 |
| 10283321 | Semiconductor processing system and methods using capacitively coupled plasma | Jang-Gyoo Yang, Matthew L. Miller, Kien N. Chuc, Qiwei Liang, Shankar Venkataraman +1 more | 2019-05-07 |
| 10256079 | Semiconductor processing systems having multiple plasma configurations | Dmitry Lubomirsky, Shankar Venkataraman | 2019-04-09 |
| 10170282 | Insulated semiconductor faceplate designs | Dmitry Lubomirsky, Shankar Venkataraman | 2019-01-01 |