Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504697 | Particle generation suppresor by DC bias modulation | Soonam Park, Xinglong Chen, Dmitry Lubomirsky | 2019-12-10 |
| 10477662 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Mathew Abraham, David Robert Evans, Jack Michael Gazza | 2019-11-12 |
| 10362664 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Mathew Abraham, David Robert Evans, Jack Michael Gazza | 2019-07-23 |