Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10477662 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Jonghoon Baek, Mathew Abraham, Jack Michael Gazza | 2019-11-12 |
| 10362664 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Jonghoon Baek, Mathew Abraham, Jack Michael Gazza | 2019-07-23 |
| 10237960 | Apparatus for and method of source material delivery in a laser produced plasma EUV light source | Alexander I. Ershov, Matthew R. Graham | 2019-03-19 |