Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10234769 | Monitoring system for an optical lithography system | Andrei Dorobantu, Joshua Jon Thornes, Kevin M. O'Brien | 2019-03-19 |
| 10237960 | Apparatus for and method of source material delivery in a laser produced plasma EUV light source | Alexander I. Ershov, David Robert Evans | 2019-03-19 |