Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10451890 | Reducing speckle in an excimer light source | Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Thomas Patrick Duffey, Herman Philip Godfried, Frank Everts, Brian Edward King | 2019-10-22 |
| 10267687 | Adjusting an amount of coherence of a light beam | Thomas F. A. Bibby, Rostislav Rokitski, Thomas Patrick Duffey | 2019-04-23 |
| 10234769 | Monitoring system for an optical lithography system | Andrei Dorobantu, Kevin M. O'Brien, Matthew R. Graham | 2019-03-19 |