Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10493504 | Apparatus for and method of active cleaning of EUV optic with RF plasma field | — | 2019-12-03 |
| 10490313 | Method of controlling debris in an EUV light source | John Tom Stewart, IV, Igor V. Fomenkov, Christianus W. J. Berendsen | 2019-11-26 |
| 10237960 | Apparatus for and method of source material delivery in a laser produced plasma EUV light source | David Robert Evans, Matthew R. Graham | 2019-03-19 |
| 10185234 | Harsh environment optical element protection | Norbert Bowering, Bruno La Fontaine, Silvia De Dea | 2019-01-22 |