Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490313 | Method of controlling debris in an EUV light source | Alexander I. Ershov, Igor V. Fomenkov, Christianus W. J. Berendsen | 2019-11-26 |
| 10349509 | Reducing the effect of plasma on an object in an extreme ultraviolet light source | Robert Jay Rafac, Andrew David LaForge | 2019-07-09 |