Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10401704 | Compensating for a physical effect in an optical system | — | 2019-09-03 |
| 10349509 | Reducing the effect of plasma on an object in an extreme ultraviolet light source | John Tom Stewart, IV, Andrew David LaForge | 2019-07-09 |
| 10314153 | Target expansion rate control in an extreme ultraviolet light source | Daniel Jason Riggs | 2019-06-04 |