Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10477662 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Jonghoon Baek, David Robert Evans, Jack Michael Gazza | 2019-11-12 |
| 10362664 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Jonghoon Baek, David Robert Evans, Jack Michael Gazza | 2019-07-23 |
| 10269633 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu +2 more | 2019-04-23 |