Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483116 | Methods of depositing metal films using metal oxyhalide precursors | David Knapp, David Thompson, Jeffrey W. Anthis, Mei Chang | 2019-11-19 |
| 10269633 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Srinivas Gandikota +2 more | 2019-04-23 |
| 10199230 | Methods for selective deposition of metal silicides via atomic layer deposition cycles | Seshadri Ganguli, Yixiong Yang, Bhushan Zope, Avgerinos V. Gelatos, Guoqiang Jian +1 more | 2019-02-05 |