Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418246 | Remote hydrogen plasma titanium deposition to enhance selectivity and film uniformity | Takashi Kuratomi, I-Cheng Chen, Faruk Gungor | 2019-09-17 |
| 10269633 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Bo Zheng, Yu Lei, Xinyu Fu, Srinivas Gandikota +2 more | 2019-04-23 |
| 10256076 | Substrate processing apparatus and methods | Shi Wei Toh, Vikash Banthia | 2019-04-09 |
| 10199230 | Methods for selective deposition of metal silicides via atomic layer deposition cycles | Seshadri Ganguli, Yixiong Yang, Bhushan Zope, Xinyu Fu, Guoqiang Jian +1 more | 2019-02-05 |