Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418246 | Remote hydrogen plasma titanium deposition to enhance selectivity and film uniformity | Takashi Kuratomi, Avgerinos V. Gelatos, I-Cheng Chen | 2019-09-17 |
| 10407771 | Atomic layer deposition chamber with thermal lid | Anqing Cui, Dien-Yeh Wu, Vikas Jangra, Muhammad M. Rasheed, Wei V. Tang +6 more | 2019-09-10 |
| RE47440 | Apparatus and method for providing uniform flow of gas | Joseph Yudovsky, Mei Chang, Paul F. Ma, David Chu, Chien-Teh Kao +2 more | 2019-06-18 |
| 10175093 | Apparatus for sensing a level of a processing medium in a delivery apparatus | — | 2019-01-08 |