Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10487399 | Atomic layer deposition chamber with counter-flow multi inject | Dien-Yeh Wu, Guodan Wei, Chun-Teh Kao | 2019-11-26 |
| 10487398 | Synthesis of metal nitride thin films materials using hydrazine derivatives | Byunghoon Yoon, Seshadri Ganguli, Siddarth A. Krishnan, Sang Ho Yu | 2019-11-26 |
| 10453657 | Apparatus for depositing metal films with plasma treatment | Daping Yao, Hyman Lam, John C. Forster, Jiang Lu, Can Xu +2 more | 2019-10-22 |
| 10431493 | Doping control of metal nitride films | Annamalai Lakshmanan, Ben-Li Sheu, Guodan Wei, Nicole Lundy | 2019-10-01 |
| RE47440 | Apparatus and method for providing uniform flow of gas | Joseph Yudovsky, Mei Chang, Faruk Gungor, David Chu, Chien-Teh Kao +2 more | 2019-06-18 |
| 10204764 | Methods for forming a metal silicide interconnection nanowire structure | Bencherki Mebarki, Annamalai Lakshmanan, Kaushal K. Singh, Andrew Cockburn, Ludovic Godet +1 more | 2019-02-12 |
| 10170321 | Aluminum content control of TiAIN films | Wenyu Zhang, Wei V. Tang, Yixiong Yang, CHEN-HAN LIN, Yi Xu +8 more | 2019-01-01 |