Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10487399 | Atomic layer deposition chamber with counter-flow multi inject | Dien-Yeh Wu, Paul F. Ma, Guodan Wei | 2019-11-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10487399 | Atomic layer deposition chamber with counter-flow multi inject | Dien-Yeh Wu, Paul F. Ma, Guodan Wei | 2019-11-26 |