Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10487398 | Synthesis of metal nitride thin films materials using hydrazine derivatives | Byunghoon Yoon, Seshadri Ganguli, Siddarth A. Krishnan, Paul F. Ma | 2019-11-26 |
| 10395916 | In-situ pre-clean for selectivity improvement for selective deposition | Kai Wu, Vikash Banthia, Mei Chang, Feiyue Ma | 2019-08-27 |
| 10358719 | Selective deposition of aluminum oxide on metal surfaces | Seshadri Ganguli | 2019-07-23 |
| 10269633 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu +2 more | 2019-04-23 |