Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10508339 | Blocker plate for use in a substrate process chamber | Xiaoxiong Yuan, Yu Lei, Yi Xu, Kazuya Daito, Pingyan Lei +2 more | 2019-12-17 |
| 10395916 | In-situ pre-clean for selectivity improvement for selective deposition | Kai Wu, Sang Ho Yu, Mei Chang, Feiyue Ma | 2019-08-27 |
| 10256076 | Substrate processing apparatus and methods | Shi Wei Toh, Avgerinos V. Gelatos | 2019-04-09 |
| 10256144 | Process integration approach of selective tungsten via fill | He Ren, Feiyue Ma, Yu Lei, Kai Wu, Mehul Naik +2 more | 2019-04-09 |