Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10508339 | Blocker plate for use in a substrate process chamber | Yu Lei, Yi Xu, Kazuya Daito, Pingyan Lei, Dien-Yeh Wu +2 more | 2019-12-17 |
| 10407771 | Atomic layer deposition chamber with thermal lid | Anqing Cui, Faruk Gungor, Dien-Yeh Wu, Vikas Jangra, Muhammad M. Rasheed +6 more | 2019-09-10 |